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dc.contributor.advisorMaier, Lothar
dc.contributor.authorMurray, Kathleen A.
dc.date.accessioned2010-02-12T21:37:26Z
dc.date.available2010-02-12T21:37:26Z
dc.date.issued1986
dc.identifier.urihttp://hdl.handle.net/10920/12690
dc.descriptioniv, 57 p.en_US
dc.description.abstractA semiconductor is a crystalline material having a conductivity between that of a conductor and an insulator. The conductivity of semiconductors can be varied by changes in temperature, optical excitation, and impurity content. This variability of electrical properties makes the semiconductor material of elementary crystalline silicon an ideal material for electronic device fabrication. Silicon has the ability of undergoing a large variety of processing steps without the problems of decomposition. One such process involved in fabrication is the chemical vapor deposition of silicon dioxide films on the silicon. Chemical vapor deposition (CVD) can be defined as a material synthesis method in which the constituents of the vapor phase react to form a solid film at the surface of a silicon wafer. Dielectric layers such as the deposited silicon dioxide, and phosphorus doped oxides, silicon dioxide rich with phosphorus pentoxide, are used in semiconductor device fabrication for the insulation between conducting layers, for diffusion and ion implantation masks, and for passification to protect devices from impurities, scratches, and moisture.en_US
dc.description.abstractIf you are not a current K College student, faculty, or staff member, email dspace@kzoo.edu to request access to this SIP.
dc.description.sponsorshipCypress Semiconductor Corporation. San Jose, California.
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen_US
dc.publisherKalamazoo Collegeen_US
dc.relation.ispartofKalamazoo College Chemistry Senior Individualized Projects Collection
dc.relation.ispartofseriesSenior Individualized Projects. Chemistry.
dc.rightsU.S. copyright laws protect this material. Commercial use or distribution of this material is not permitted without prior written permission of the copyright holder. All rights reserved.
dc.titleAn Analysis of Phosphorus in Chemical Vapor Deposited Films for Semiconductor Device Fabricationen_US
dc.typeThesisen_US


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  • Chemistry Senior Individualized Projects [860]
    This collection includes Senior Individualized Projects (SIP's) completed in the Chemistry Department. Abstracts are generally available to the public, but PDF files are available only to current Kalamazoo College students, faculty, and staff.

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